000 00383nam a2200169Ia 4500
008 190201s9999 xx 000 0 und d
020 _a471580058
082 _a621
082 _b38173
100 _a"Ghandhi, Sorab K"
245 0 _aVLSI Fabrication Princip
250 _aSecond
260 _aNew York
260 _bJohn Wiley & Sons
260 _c1994
300 _a"XXIV, 834"
999 _c36713
_d36713